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Markku Leskelä
Researcher Next ID · RN-007276
Researcher · Engineering
Helsinki, Finland
Not currently recruitingFunding unknown
- Works count
- 1,191
- Citation count
- 39,497
- H-index
- 90
- i10-index
- 643
Research interests
Engineering
Materials Science
Semiconductor materials and devices
X-ray Diffraction in Crystallography
Crystallization and Solubility Studies
Electronic and Structural Properties of Oxides
Catalytic Processes in Materials Science
Publications
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
Journal of Applied Physics · 2013 · https://doi.org/10.1063/1.4757907
Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
Angewandte Chemie International Edition · 2003 · https://doi.org/10.1002/anie.200301652
Atomic layer deposition (ALD): from precursors to thin film structures
Thin Solid Films · 2002 · https://doi.org/10.1016/s0040-6090(02)00117-7
Current projects
No projects listed.