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Mikko Ritala
Researcher Next ID · RN-007332
Researcher · Engineering
Helsinki, Finland
Not currently recruitingFunding unknown
- Works count
- 750
- Citation count
- 31,345
- H-index
- 85
- i10-index
- 450
Research interests
Engineering
Materials Science
Semiconductor materials and devices
Electronic and Structural Properties of Oxides
Catalytic Processes in Materials Science
Copper Interconnects and Reliability
ZnO doping and properties
Publications
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
Journal of Applied Physics · 2013 · https://doi.org/10.1063/1.4757907
Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
Angewandte Chemie International Edition · 2003 · https://doi.org/10.1002/anie.200301652
Atomic layer deposition (ALD): from precursors to thin film structures
Thin Solid Films · 2002 · https://doi.org/10.1016/s0040-6090(02)00117-7
Current projects
No projects listed.